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Electro-Thermo-Mechanical Modeling of a V-beam Actuator

Electrostatic actuation, commonly used in MEMS, is based on the electrostatic fields and the forces they generate on the structures. The deformation of electrodes, caused by the electrostatic forces, is the main concern in electromechanical actuators such as RF micro-switches, comb-drives and Pressure sensors.

Electro-structural analysis of a MEMS Comb Drive Actuator