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Electro-Thermo-Mechanical Modeling of a V-beam Actuator


Electro-Thermo-Mechanical Modeling of a V-beam Actuator

Modeling-Simulation and Analysis of MEMS microsensing membrane


Electrostatic actuation, commonly used in MEMS, is based on the electr...

Electro-structural analysis of a MEMS Comb Drive Actuator


Electro-structural analysis of a MEMS Comb Drive Actuator