ElectroMagneticWorks' Low Frequency Suite - EMS Electrostatics
EMS Electrostatic Analysis
Does your design require careful attention to dielectric breakdown or electronic discharge issues? Are corona effects of interest/concern to you? Are you worried about sparking and grounding? Do you work on linear or circular particle acceleration? Is the success of your MEMS design hinging on the proper electrostatic actuation? What about proper shielding of circuits and cross-talk among transmission lines?
If you have any of these questions, then EMS's electrostatic solver is right for you!